Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology

Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography

This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 mm in diameter. This inner mirror plate is connected to a rigid frame via a pair of torsion bars in two diametrically opposite ends located on the rotation...

Micro Contacts and Micro Manipulation with Mems Actuator Arrays

As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...

State-of-the-art of MEMS Technology for Design and Fabrication of Micro-Mirrors

This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the differe...

Computational Aspects of Fabrication: Modeling, Design, and 3D Printing

The digital age in manufacturing is giving rise to output devices that allow rapid customization and manufacturing, revolutionizing how we design, develop, fabricate, distribute, and consume products. 3D printing is considered a disruptive technology with a potentially tremendous socioeconomic impact. In recent years, 3Dprinting technologies have progressed significantly in terms of sophisticat...

MEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterization